1.仪器基本情况

俄歇电子能谱是一种利用高能电子束为激发源的表面分析技术。其作用深度仅为几个原子层,通过分析电子束激发的特征俄歇电子的能量可以获得表面元素的定性及定量结果;结合离子刻蚀技术可以方便获得材料表面沿深度方向的元素分布状态,是表面成分分析的重要手段之一。

2.参数及指标

1) 极限真空度:5.0×10-10 mbar

2) 扫描俄歇图像分辨率优于50 nm

3) 检测限优于1%

3.仪器应用

元素成分;元素成分的深度剖析;广泛的应用于材料相关领域的研究,特别是在半导体材料,导体薄膜工艺以及失效分析等领域。

 



锡球的扫描电镜图像                                            锡球的扫描俄歇图像

 

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