1.仪器基本情况

扫描探针显微镜(Scanning ProbeMicroscope, SPM)是扫描隧道显微镜及在扫描隧道显微镜的基础上发展起来的各种新型探针显微镜(原子力显微镜AFM,磁力显微镜MFM)的统称,是一种综合性的表面纳米结构形貌及性能表征仪器。

2.指标及参数

1) 原子力模式,扫描隧道模式,静电力模式,磁力模式;

2) 真空度:5.0×10-10  mbar

3) 在室温下扫描范围XY方向10 µm×10µmZ方向2µm

4) 分辨率0.1nm

5) 具备扫描开尔文探针显微镜(KPFM)功能,可测量样品表面的功函数,并对委屈进行功函数扫描成像。

3.仪器应用

材料表面形貌观察:石墨烯,半导体材料表面,薄膜表面;纳米材料表面性能测试:电性能,磁性能及力学性能。

 

超高真空下橄榄石的偏压图(左)和形貌(右)图1×1 µm2(256×256 pixels)

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