1. 仪器基本情况

双束扫描电镜集合了聚焦离子束(FIB)的加工能力、材料沉积能力和扫描电子显微镜的观察分析能力,实现了纳米规模的快速加工与成型,高分辨的三维表征与分析以及进行定位TEM样品制备和截面分析等功能。该设备上配有STEMEDS,EBSD等附件,以及3D图像技术,Maps等软件。全套三维重构软件能实现标准样品电子图像(SEBSE图像、EDSEBSD)的三维重构,协助用户实现实际样品的三维重构工作。高分辨拼图功能可将高分辨图像进行大面积拼接,并可读取拼接图在任意点的高分辨图像。

2.指标及参数

离子束系统:分辨率≤5.0nm@30kV,加速电压为0.5kV-30kV,束流强度0.6pA-65nA;

电子束系统:分辨率≤2nm@30kV(二次电子)≤1.0nm@15kV(二次电子)≤1.6nm@1kV(二次电子)STEM分辨率:≤0.8nm@30kV(二次电子)≤3nm@30kV(背散射电子),束流强度最小束流为1pA,最大束流400nA;

能谱仪:晶体有效检测面积不小于100mm2,能量分辨率优于129eV(STD),计数率1600000cps,最大输出计数率>800000cps;

EBSD:扫描和指标化速度:1000/秒,取向测量精度优于0.1度;

全套三维重构软件;

高分辨拼图功能。

3.应用:

主要涉及材料科学、微纳加工、半导体器件制造、纳米生物、地质学等方面的应用,提供SEMBSESTEMEDSEBSDTEM样品制备、3D重构以及高分辨大面积拼图等分析功能。

定位TEM制样

高分辨拼图



STEM下金颗粒

扫描电镜下锡球标样

EDS图像

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